Application Type
National
Application SubType
(10) Registration Number and Date
10202401167Q
Status
ACTIVE ( W10)
(180) Expiration Date
(20) Filing Number and Date
SG 10202401167Q 2023.12.31
(40) Publication Number and Date
(86) PCT Filing Number and Date
(87) PCT Publication Number and Date
(85) National Entry Date
(30) Priority Details
JP
JP2023-073547
2023.01.01
(51) IPC Classes
    (74) Representative
    (54) Title
    (57) Abstract
    (EN) ABSTRACT OF THE DISCLOSURE ABSTRACT POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM FOR OPERATING COMPUTER, AND POLISHING APPARATUS A polishing method includes: during polishing of the workpiece, creating a reference spectrum history and a monitoring spectrum history by repeatedly producing a reference spectrum and a monitoring spectrum at two points on the workpiece; calculating a plurality of reference history differences that are differences between a latest monitoring spectrum and a plurality of reference spectra in the reference spectrum history; calculating a plurality of monitoring history differences that are differences between a latest reference spectrum and a plurality of monitoring spectra in the monitoring spectrum history; calculating a film-thickness difference between a monitoring point and a reference point based on a local minimum point of a reference history difference or a monitoring history difference. FIG. 6
    (58) Citations
    License Details
    (98) Annuity Details
    YearValidity StartValidity EndPayment
    Document Type Date Action
    Description (with claims) 2024-04-22T00:00:00Z
    Abstract 2024-04-22T00:00:00Z
    Event NameDateLink
    W102023-12-31
    W102023-12-31
    W102023-12-31