Application Type
National
Application SubType
(10) Registration Number and Date
10202401167Q
Status
ACTIVE ( W10)
(180) Expiration Date
(20) Filing Number and Date
SG 10202401167Q 2023.12.31
(40) Publication Number and Date
(85) National Entry Date
(30) Priority Details
JP
JP2023-073547
2023.01.01
(51) IPC Classes
(72) Inventor
(74) Representative
(54) Title
(57) Abstract
(EN) ABSTRACT OF THE DISCLOSURE ABSTRACT POLISHING METHOD, COMPUTER-READABLE STORAGE MEDIUM STORING PROGRAM FOR OPERATING COMPUTER, AND POLISHING APPARATUS A polishing method includes: during polishing of the workpiece, creating a reference spectrum history and a monitoring spectrum history by repeatedly producing a reference spectrum and a monitoring spectrum at two points on the workpiece; calculating a plurality of reference history differences that are differences between a latest monitoring spectrum and a plurality of reference spectra in the reference spectrum history; calculating a plurality of monitoring history differences that are differences between a latest reference spectrum and a plurality of monitoring spectra in the monitoring spectrum history; calculating a film-thickness difference between a monitoring point and a reference point based on a local minimum point of a reference history difference or a monitoring history difference. FIG. 6
(58) Citations
License Details
(98) Annuity Details
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