Application Type
National
Application SubType
(10) Registration Number and Date
10202401121T
Status
ACTIVE ( W10)
(180) Expiration Date
(20) Filing Number and Date
SG 10202401121T 2023.12.31
(40) Publication Number and Date
(85) National Entry Date
(30) Priority Details
JP
JP2023-068874
2023.01.01
(51) IPC Classes
(71/73) Applicant
(72) Inventor
(74) Representative
(54) Title
(57) Abstract
(EN) ABSTRACT TITLE OF INVENTION: COMPOSITION FOR FORMING ORGANIC FILM, METHOD FOR FORMING ORGANIC FILM, AND PATTERNING PROCESS The present invention is a composition for formingan organic film, comprising: a resin for forming anorganic film; a polymer having a unit represented by thefollowing general formula (I), and at least one of aunit represented by the following general formula (II)and a unit represented by the following general formula(III); and a solvent, wherein the unit represented bythe following general formula (I), and at least one ofthe unit represented by the following general formula(II) and the unit represented by the following generalformula (III) form a random copolymer, and the polymerhas a fluorine content of 5 mass% to 16 mass%. Thisprovides: a composition for forming an organic film thathas excellent film-formability on a substrate andfilling characteristics, and that inhibits humps in EBRprocess; and a method for forming an organic film, andpatterning process using this composition.[Fig.2] 139
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(98) Annuity Details
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