Application Type
National Patent
Application SubType
(10) Registration Number and Date
Status
ACTIVE ( Other event occurred)
(180) Expiration Date
(20) Filing Number and Date
MY PI2025005688 2025.09.19
(40) Publication Number (Gazette Number) and Date
(85) National Entry Date
(30) Priority Details
JP
JP2024-169153
2024.09.27
(51) IPC Classes
(71/73) Applicant
(72) Inventor
(74) Representative
(EN) TIMOTHY SIAW YEAN HWA : C/O SHEARN DELAMORE & CO., 7TH FLOOR, WISMA HAMZAH-KWONG HING, NO. 1, LEBOH AMPANG 50100 KUALA LUMPUR
(54) Title
(EN) WORK APPARATUS AND CARRY-IN/OUT APPARATUS
(57) Abstract
(EN) A work apparatus comprises a carry-in/out mechanism and a moving mechanism for moving the carry-in/out mechanism, wherein the carry-in/out mechanism includes a substrate support member for supporting a substrate, an advancement/retraction mechanism configured to advance/retract the substrate support member, a substrate conveyance mechanism for conveying the substrate, and a lifting/lowering mechanism configured to lift/lower the substrate conveyance mechanism, the advancement/retraction mechanism includes a base end portion support member for supporting a base end portion of the substrate support member, and a drive portion for moving the base end portion support member, the base end portion is provided at an end portion of the substrate support member, and the lifting/lowering mechanism lifts/lowers the substrate conveyance mechanism and thereby the substrate is transferred between the substrate support member and the substrate conveyance mechanism. Figure 1.
(58) Citations
License Details
(98) Annuity Details
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